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DEMCON

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PMQT4

DEMCON, PMQT
 

DEMCON has been developing and building highly complex qualification tools to support both development and production at ASML for many years. One example is the Position Module Qualification Tool Mk 4 (PMQT4). This is a fourth-generation qualification tool for the wafer positioning module of an ASML lithography machine, in this case the NXT platform.

The DEMCON qualification systems have the same mechanical interface as the ASML machines and are equipped with complex control software for real-time regulations in several degrees of freedom. They test and qualify a large number of properties, in the magnetic, electrical, mechanical, thermal and software (control) domains, of the connections of pipelines and cables to the highly precise specifications for the dynamic behaviour.

Qualification of a position module with the PMQT4 takes a few hours. In that time, more than 200 parameters are qualified, such as positioning accuracies, rigidity, engine constants and connectivity (electrical, pneumatic and hydraulic). DEMCON opted for a complete redesign, with a view to improving the reliability and acceleration of the development process at ASML. Thus the number of connectivity tests was expanded, the reliability of the tool was increased further and the ergonomics (accessibility of the tool) were improved. Once again, DEMCON was also able to conceive smart solutions for the ultimate test, the qualification of the qualification tool. As with almost all ASML projects, the development took place in close cooperation with ASML. Engineers from both companies work together closely throughout the project cycle in order to guarantee a good result and prevent any negative surprises.

For accurate positioning over a wide range, the positioning module has separate stages for long stroke and short stroke movements. DEMCON has designed the PMQT4 to enable the long and the short stroke to be tested separately. In the development phase, this shortens the design process. After all, designers of one stage no longer have to wait until a prototype for the other stage is available, but can start testing right away.

DEMCON performs projects for building qualification tools on a turn-key basis. Because these tools are deployed in production at ASML, they must be fast and simple to operate and lead to as little downtime as possible. To that end, DEMCON provides for the maintenance and offers a 24/7 service. In this way, DEMCON manages to qualify itself time and again as a reliable partner of ASML.

Barend Vermeulen
"A good match with ASML"

We have been providing qualification tools to ASML for more than 20 years now. During that period, we have built up an excellent relationship with them. Our competencies match what they need exactly, we understand how the ASML machines work and we are familiar with the hardware and the control systems. We therefore know what is needed for the interfaces of our tools with their modules.

We speak the same language and our people can contribute ideas well; if required, we station engineers in Veldhoven full-time for a project. If necessary, we can propose creative solutions for problems that they have sometimes been struggling with for quite some time. We can fit in with the ASML way of working and can deal well with their steering and documentation methods.

ASML has now entrusted us with working on a module that will be installed in the machines themselves. That is our ambition: the development and serial production of complex modules. Of course, it helps that we have been located close to clients such as ASML through our location in Best. Another advantage is that we are able to win the loyalty of more talented people from the Eindhoven region.

Barend Vermeulen
business unit manager hightech systems

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About Demcon

Demcon is a high-end technology supplier of products and systems. In a world in which technology increasingly plays a role in solving contemporary social issues, Demcon supports clients with a wide range of competencies. As a system supplier, Demcon can meet the entire needs of its clients, from initial idea and concept, to prototyping, industrialization and (series) production. In addition, Demcon develops its own products and, through an innovation program, investments are made in both start-ups and established companies. Demcon is certified for ISO 9001:2015 and ISO 13485:2016.

Corporations

  • DEMCON advanced mechatronics
  • DEMCON Focal
  • DEMCON industrial systems
  • DEMCON kryoz
  • DEMCON macawi medical systems
  • DEMCON metal injection moulding
  • DEMCON multiphysics
  • DEMCON nymus3D
  • DEMCON production
  • DEMCON unmanned systems
  • Dutch United Instruments
  • Finapres Medical Systems
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